Optimization of a DC vacuum arc to obtain anatase phase TiO2 coatings
In this work, the characterization of TiO2 coatings obtained with a dc cathodic arc is presented. The arc was run with a current of 100 A. Glass samples placed in front of the cathode on the chamber axis were exposed to the discharge during 5 min. The samples were mounted on a heater that allows hea...
| Autores principales: | , , |
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| Formato: | JOUR |
| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p223_Kleiman |
| Aporte de: |
| Sumario: | In this work, the characterization of TiO2 coatings obtained with a dc cathodic arc is presented. The arc was run with a current of 100 A. Glass samples placed in front of the cathode on the chamber axis were exposed to the discharge during 5 min. The samples were mounted on a heater that allows heating the sample up to 400 °C. The gas flow and the sample temperature were varied in order to find the optimum conditions for growing TiO2 in anatase phase. The coatings were analyzed by X-Ray Diffraction and Scanning Electron Microscopy. The results obtained by varying the gas flow in a range of 30 - 40 sccm and the sample temperature from 200 to 400 °C are presented. © 2006 American Institute of Physics. |
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