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Aluminum
2
Atomic layer deposited
2
Atomic layer deposition
2
C-V measurement
2
Capacitance-voltage techniques
2
Constant capacitance
2
Electrical characteristic
2
Electron trap density
Electron traps
2
Experimental evidence
2
Insulating layers
2
MOS capacitors
2
Main effect
2
Non-volatile memories
2
Non-volatile memory application
2
Physical model
2
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1
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2