MOS capacitors Aluminum 2 Atomic layer deposited 2 Atomic layer deposition 2 C-V measurement 2 Capacitance-voltage techniques 2 Constant capacitance 2 Electrical characteristic 2 Electron trap density 2 Electron traps 2 Experimental evidence 2 Hafnium compounds 2 High-K dielectrics 2 High-k dielectric 2 Insulating layers 2 MOS 2 Main effect 2 Measurement techniques 2 Nanoelectronics 2 Non-volatile memories 2 Non-volatile memory application 2 Physical model 2 Radiation effects 2 Radiation response 2