Phase shift 38 Interferometry 14 Interferometers 10 Liquid crystal displays 8 Extreme ultraviolet lithography 6 Extreme ultraviolets 6 High-precision 6 Light modulators 6 Liquid crystals 6 PHASE SHIFT 6 Phase-shift interferometer 6 Phase-shifting interferometers 6 Pulsed lasers 6 Ar-laser 4 Argon lasers 4 Atoms 4 Different planes 4 Diffraction 4 EUV lasers 4 Final state 4 Harmonic oscillation 4 Holograms 4 Holography 4 Image processing 4 Interfaces (materials) 4 Interference oscillations 4 Interferometric techniques 4 Ionization 4 Massive particles 4 Modulation 4