On the use of cross-polarization measurements in the detection of grating asymmetries
The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to dete...
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| Formato: | Acta de conferencia Capítulo de libro |
| Lenguaje: | Inglés |
| Publicado: |
2001
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| Acceso en línea: | Registro en Scopus DOI Handle Registro en la Biblioteca Digital |
| Aporte de: | Registro referencial: Solicitar el recurso aquí |
| LEADER | 04434caa a22005537a 4500 | ||
|---|---|---|---|
| 001 | PAPER-20515 | ||
| 003 | AR-BaUEN | ||
| 005 | 20250221084814.0 | ||
| 008 | 190411s2001 xx ||||fo|||| 10| 0 eng|d | ||
| 024 | 7 | |2 scopus |a 2-s2.0-0035759624 | |
| 030 | |a PSISD | ||
| 040 | |a Scopus |b spa |c AR-BaUEN |d AR-BaUEN | ||
| 100 | 1 | |a Depine, Ricardo Angel | |
| 245 | 1 | 3 | |a On the use of cross-polarization measurements in the detection of grating asymmetries |
| 260 | |c 2001 | ||
| 270 | 1 | 0 | |m Depine, R.A.; Grupo de Electromagnetismo Aplicado, Departamento de Física, Universidad de Buenos Aires, 1428 Buenos Aires, Argentina; email: rdep@df.uba.ar |
| 504 | |a Logofatu, P.C., Coulombe, S.A., Minhas, B.K., Mc-Neil, J.R., Identity of the cross-reflection coefficients for the symmetric surface-relief gratings (1999) J. Opt. Soc. Am. A, 16, pp. 1108-1114 | ||
| 504 | |a Li, L., Symmetries of cross-polarization diffraction coefficients of gratings (2000) J. Opt. Soc. Am. A, 17, pp. 881-887 | ||
| 504 | |a Vincent, P., Nevière, M., The reciprocity theorem for corrugated surfaces used in conical diffraction mountings (1979) Opt. Acta, 26, pp. 889-898 | ||
| 504 | |a Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction (1995) Opt. Commun., 117, pp. 223-227 | ||
| 504 | |a Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction: Erratum (2001) Opt. Commun., 190, p. 391 | ||
| 504 | |a Chandezon, J., Dupuis, M., Cornet, G., Maystre, D., Multicoated gratings: A differential formalism applicable in the entire optical region (1982) J. Opt. Soc. Am. A, 72, pp. 839-846 | ||
| 504 | |a Li, L., Multilayer-coated diffraction gratings: Differential method of Chandezon et al. revisited (1994) J. Opt. Soc. Am. A, 11, pp. 2816-2828A4 - SPIE; Laseroptics SA (Argentina); Optical Society of America; International Commission for Optics; Spectra-Physics GmbH (Germany) | ||
| 506 | |2 openaire |e Política editorial | ||
| 520 | 3 | |a The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique. |l eng | |
| 593 | |a Grupo de Electromagnetismo Aplicado, Departamento de Física, Universidad de Buenos Aires, 1428 Buenos Aires, Argentina | ||
| 690 | 1 | 0 | |a CHARACTERIZATION TECHNIQUES |
| 690 | 1 | 0 | |a ELIPSOMETRY |
| 690 | 1 | 0 | |a GRATINGS |
| 690 | 1 | 0 | |a SCATTEROMETRY |
| 690 | 1 | 0 | |a COMPUTER SIMULATION |
| 690 | 1 | 0 | |a ELLIPSOMETRY |
| 690 | 1 | 0 | |a ERROR ANALYSIS |
| 690 | 1 | 0 | |a LIGHT POLARIZATION |
| 690 | 1 | 0 | |a LIGHT REFLECTION |
| 690 | 1 | 0 | |a LIGHT SCATTERING |
| 690 | 1 | 0 | |a CROSS-POLARIZATION ASYMMETRIES |
| 690 | 1 | 0 | |a GRATING ASYMMETRIES |
| 690 | 1 | 0 | |a DIFFRACTION GRATINGS |
| 700 | 1 | |a Kaufmann, G.H. | |
| 711 | 2 | |c Tandil |d 3 September 2001 through 7 September 2001 |g Código de la conferencia: 59919 | |
| 773 | 0 | |d 2001 |g v. 4419 |h pp. 773-775 |p Proc SPIE Int Soc Opt Eng |n Proceedings of SPIE - The International Society for Optical Engineering |x 0277786X |t 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications | |
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| 856 | 4 | 0 | |u https://doi.org/10.1117/12.437154 |x doi |y DOI |
| 856 | 4 | 0 | |u https://hdl.handle.net/20.500.12110/paper_0277786X_v4419_n_p773_Depine |x handle |y Handle |
| 856 | 4 | 0 | |u https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_0277786X_v4419_n_p773_Depine |x registro |y Registro en la Biblioteca Digital |
| 961 | |a paper_0277786X_v4419_n_p773_Depine |b paper |c NP | ||
| 962 | |a info:eu-repo/semantics/conferenceObject |a info:ar-repo/semantics/documento de conferencia |b info:eu-repo/semantics/publishedVersion | ||
| 963 | |a NORI | ||