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01475cas a22003852a 4500 |
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931011d19922008okuqr p 0 a0eng c |
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|y 1074-407X
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|a (EBZ)ebs576775e
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| 040 |
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|a TxU
|b eng
|d EBZ
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|a pcc nsdp
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|a TK7871.85
|b .M519
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|a Microlithography world (Online)
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| 222 |
1 |
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|a Microlithography world
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|a Microlithography world
|h [electronic resource].
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| 260 |
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|a Port Washington, N.Y. :
|b Penn Well Publication, published in cooperation with SPIE,
|c [1992]-2008.
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| 310 |
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|a Quarterly,
|b Jan./Feb./Mar. 1993-
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| 362 |
0 |
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|a Vol. 1, no. 1 (Mar./Apr. 1992)-
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| 362 |
1 |
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|a Ceased with v. 17, no. 4 (Nov. 2008).
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| 500 |
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|a Title from cover.
|
| 500 |
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|a Published: Tulsa, OK, Oct., Nov., Dec. 1993-
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| 650 |
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|a Semiconductors
|x Design and construction
|v Periodicals.
|
| 650 |
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0 |
|a Microlithography
|v Periodicals.
|
| 650 |
|
0 |
|a Masks (Electronics)
|v Periodicals.
|
| 650 |
1 |
7 |
|a Microlithografie.
|2 gtt
|
| 710 |
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|a Society of Photo-optical Instrumentation Engineers.
|
| 773 |
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|t Academic Search Premier
|d EBSCO
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| 776 |
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|t Microlithography world
|x 1074-407X
|w (OCoLC)28982886
|w (DLC)93659127
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| 856 |
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|3 Full text available: May 2003-Nov 2008.
|z Available in Academic Search Premier.
|u https://search.ebscohost.com/direct.asp?db=aph&jid=%229CK%22&scope=site
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|c 84408
|d 84408
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|z EBS
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|c REL
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