Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots
Nanostructuring of metallic and semiconductor surfaces in the sub-100 nm range is a key point in the development of future technologies. In this work we describe a simple and low-cost method for metal nanostructuring with 50 nm lateral and 6 nm vertical resolutions based on metal film deposition on...
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| Formato: | Articulo |
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2004
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| Acceso en línea: | http://sedici.unlp.edu.ar/handle/10915/159818 |
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I19-R120-10915-1598182023-11-06T20:07:18Z http://sedici.unlp.edu.ar/handle/10915/159818 Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots Azzaroni, Omar Fonticelli, Mariano Hernán Schilardi, Patricia Laura Benitez, Guillermo Alfredo Caretti, I. Albella, José M. Gago, Raúl Vázquez, Luis Salvarezza, Roberto Carlos 2004-04 2023-11-06T15:29:17Z en Química Física nanostructuring metallic and semiconductor surfaces metal Nanostructuring of metallic and semiconductor surfaces in the sub-100 nm range is a key point in the development of future technologies. In this work we describe a simple and low-cost method for metal nanostructuring with 50 nm lateral and 6 nm vertical resolutions based on metal film deposition on a silane-derivatized nanostructured silicon master. The silane monolayer anti-sticking properties allow nanopattern transfer from the master to the deposited metal films as well as easy film detachment. The method is non-destructive, allowing the use of the derivatized master several times without damaging. Potential applications of the method are in the field of high-density data storage, heterogeneous catalysis and electrocatalysis, microanalysis (sensors and biosensors) and new optical devices. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas Articulo Articulo http://creativecommons.org/licenses/by/3.0/ Creative Commons Attribution 3.0 Unported (CC BY 3.0) application/pdf S197-S200 |
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Universidad Nacional de La Plata |
| institution_str |
I-19 |
| repository_str |
R-120 |
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SEDICI (UNLP) |
| language |
Inglés |
| topic |
Química Física nanostructuring metallic and semiconductor surfaces metal |
| spellingShingle |
Química Física nanostructuring metallic and semiconductor surfaces metal Azzaroni, Omar Fonticelli, Mariano Hernán Schilardi, Patricia Laura Benitez, Guillermo Alfredo Caretti, I. Albella, José M. Gago, Raúl Vázquez, Luis Salvarezza, Roberto Carlos Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| topic_facet |
Química Física nanostructuring metallic and semiconductor surfaces metal |
| description |
Nanostructuring of metallic and semiconductor surfaces in the sub-100 nm range is a key point in the development of future technologies. In this work we describe a simple and low-cost method for metal nanostructuring with 50 nm lateral and 6 nm vertical resolutions based on metal film deposition on a silane-derivatized nanostructured silicon master. The silane monolayer anti-sticking properties allow nanopattern transfer from the master to the deposited metal films as well as easy film detachment. The method is non-destructive, allowing the use of the derivatized master several times without damaging. Potential applications of the method are in the field of high-density data storage, heterogeneous catalysis and electrocatalysis, microanalysis (sensors and biosensors) and new optical devices. |
| format |
Articulo Articulo |
| author |
Azzaroni, Omar Fonticelli, Mariano Hernán Schilardi, Patricia Laura Benitez, Guillermo Alfredo Caretti, I. Albella, José M. Gago, Raúl Vázquez, Luis Salvarezza, Roberto Carlos |
| author_facet |
Azzaroni, Omar Fonticelli, Mariano Hernán Schilardi, Patricia Laura Benitez, Guillermo Alfredo Caretti, I. Albella, José M. Gago, Raúl Vázquez, Luis Salvarezza, Roberto Carlos |
| author_sort |
Azzaroni, Omar |
| title |
Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| title_short |
Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| title_full |
Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| title_fullStr |
Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| title_full_unstemmed |
Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| title_sort |
surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots |
| publishDate |
2004 |
| url |
http://sedici.unlp.edu.ar/handle/10915/159818 |
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