Parametric analysis on the design of RF mems series switches

A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...

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Autores principales: Lonac, Julio Andrés, Merletti, Gustavo Ariel
Formato: publishedVersion Artículo
Lenguaje:Inglés
Publicado: European Scientific Institute 2015
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Acceso en línea:https://ri.unsam.edu.ar/handle/123456789/780
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spelling I78-R216-123456789-7802020-12-26T22:05:41Z Parametric analysis on the design of RF mems series switches Lonac, Julio Andrés Merletti, Gustavo Ariel RF MEMS PULL-IN VOLTAGE CANTILEVER BEAM S-PARAMETERS INGENIERÍA T TECNOLOGÍA Ingeniería Civil, Eléctrica, Mecánica e Ingenierías Relacionadas info:eu-repo/semantics/publishedVersion A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results. Fil: Lonac, Julio Andrés. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Consejo Nacional de Investigaciones Científicas y Técnicas. Argentina Fil: Merletti, Gustavo Ariel. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina 2015-12 info:eu-repo/semantics/article info:ar-repo/semantics/artículo Lonac, Julio Andrés; Merletti, Gustavo Ariel; Parametric analysis on the design of RF mems series switches; European Scientific Institute; European Scientific Journal; 1; 12-2015; 248-257 1857-7881 https://ri.unsam.edu.ar/handle/123456789/780 eng info:eu-repo/semantics/openAccess https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ Creative Commons Atribución-NoComercial-CompartirIgual 2,5 Argentina (CC BY-NC-SA 2,5) application/pdf 10 p. application/pdf European Scientific Institute European Scientific Journal. 2015; 1: 248-257 https://eujournal.org/index.php/esj/article/view/6694/6427
institution Universidad Nacional de General San Martín
institution_str I-78
repository_str R-216
collection Repositorio Institucional de la UNSAM
language Inglés
topic RF MEMS
PULL-IN VOLTAGE
CANTILEVER BEAM
S-PARAMETERS
INGENIERÍA T TECNOLOGÍA
Ingeniería Civil, Eléctrica, Mecánica e Ingenierías Relacionadas
spellingShingle RF MEMS
PULL-IN VOLTAGE
CANTILEVER BEAM
S-PARAMETERS
INGENIERÍA T TECNOLOGÍA
Ingeniería Civil, Eléctrica, Mecánica e Ingenierías Relacionadas
Lonac, Julio Andrés
Merletti, Gustavo Ariel
Parametric analysis on the design of RF mems series switches
topic_facet RF MEMS
PULL-IN VOLTAGE
CANTILEVER BEAM
S-PARAMETERS
INGENIERÍA T TECNOLOGÍA
Ingeniería Civil, Eléctrica, Mecánica e Ingenierías Relacionadas
description A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.
format publishedVersion
Artículo
Artículo
author Lonac, Julio Andrés
Merletti, Gustavo Ariel
author_facet Lonac, Julio Andrés
Merletti, Gustavo Ariel
author_sort Lonac, Julio Andrés
title Parametric analysis on the design of RF mems series switches
title_short Parametric analysis on the design of RF mems series switches
title_full Parametric analysis on the design of RF mems series switches
title_fullStr Parametric analysis on the design of RF mems series switches
title_full_unstemmed Parametric analysis on the design of RF mems series switches
title_sort parametric analysis on the design of rf mems series switches
publisher European Scientific Institute
publishDate 2015
url https://ri.unsam.edu.ar/handle/123456789/780
work_keys_str_mv AT lonacjulioandres parametricanalysisonthedesignofrfmemsseriesswitches
AT merlettigustavoariel parametricanalysisonthedesignofrfmemsseriesswitches
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