Parametric analysis on the design of RF mems series switches

A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...

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Detalles Bibliográficos
Autores principales: Lonac, Julio Andrés, Merletti, Gustavo Ariel
Formato: publishedVersion Artículo
Lenguaje:Inglés
Publicado: European Scientific Institute 2015
Materias:
RF MEMS
PULL-IN VOLTAGE
CANTILEVER BEAM
S-PARAMETERS
INGENIERÍA T TECNOLOGÍA
Ingeniería Civil, Eléctrica, Mecánica e Ingenierías Relacionadas
Acceso en línea:https://ri.unsam.edu.ar/handle/123456789/780
Aporte de:
Repositorio Institucional de la UNSAM de Universidad Nacional de General San Martín
Descripción
Sumario:A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.

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