Note: Focus error detection device for thermal expansion-recovery microscopy (ThERM)

An innovative focus error detection method is presented that is only sensitive to surface curvature variations, canceling both thermoreflectance and photodefelection effects. The detection scheme consists of an astigmatic probe laser and a four-quadrant detector. Nonlinear curve fitting of the defoc...

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Detalles Bibliográficos
Autores principales: Domené, E.A., Martínez, O.E.
Formato: JOUR
Materias:
Axial resolutions
Defocusing
Detection device
Detection methods
Detection scheme
Four-quadrant
Lateral resolution
Nonlinear curve fitting
Probe laser
Pump beams
Surface curvatures
Thermoreflectance
Curve fitting
Cutoff frequency
Thermal expansion
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_00346748_v84_n1_p_Domene
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
Descripción
Sumario:An innovative focus error detection method is presented that is only sensitive to surface curvature variations, canceling both thermoreflectance and photodefelection effects. The detection scheme consists of an astigmatic probe laser and a four-quadrant detector. Nonlinear curve fitting of the defocusing signal allows the retrieval of a cutoff frequency, which only depends on the thermal diffusivity of the sample and the pump beam size. Therefore, a straightforward retrieval of the thermal diffusivity of the sample is possible with microscopic lateral resolution and high axial resolution (∼100 pm). © 2013 American Institute of Physics.

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