Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spr...
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| Formato: | JOUR |
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| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu |
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todo:paper_1077260X_v10_n3_p472_Pu2023-10-03T16:03:30Z Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes Pu, C. Park, S. Chu, P.B. Lee, S.-S. Tsai, M. Peale, D. Bonadeo, N.H. Brener, I. Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
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R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices |
| spellingShingle |
Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices Pu, C. Park, S. Chu, P.B. Lee, S.-S. Tsai, M. Peale, D. Bonadeo, N.H. Brener, I. Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| topic_facet |
Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices |
| description |
We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times. |
| format |
JOUR |
| author |
Pu, C. Park, S. Chu, P.B. Lee, S.-S. Tsai, M. Peale, D. Bonadeo, N.H. Brener, I. |
| author_facet |
Pu, C. Park, S. Chu, P.B. Lee, S.-S. Tsai, M. Peale, D. Bonadeo, N.H. Brener, I. |
| author_sort |
Pu, C. |
| title |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| title_short |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| title_full |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| title_fullStr |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| title_full_unstemmed |
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| title_sort |
electrostatic actuation of three-dimensional mems mirrors using sidewall electrodes |
| url |
http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu |
| work_keys_str_mv |
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