Pu, C., Park, S., Chu, P., Lee, S., Tsai, M., Peale, D., . . . Brener, I. Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes.
Cita Chicago Style (17a ed.)Pu, C., S. Park, P.B Chu, S.-S Lee, M. Tsai, D. Peale, N.H Bonadeo, y I. Brener. Electrostatic Actuation of Three-dimensional MEMS Mirrors Using Sidewall Electrodes.
Cita MLA (8a ed.)Pu, C., et al. Electrostatic Actuation of Three-dimensional MEMS Mirrors Using Sidewall Electrodes.
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