Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes

We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spr...

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Detalles Bibliográficos
Autores principales: Pu, C., Park, S., Chu, P.B., Lee, S.-S., Tsai, M., Peale, D., Bonadeo, N.H., Brener, I.
Formato: JOUR
Materias:
Electrostatic actuation
Microelectromechanical systems (MEMS)
Optical cross-connect (OXC)
Optical switching
Sidewall-electrodes
Digital to analog conversion
Electric potential
Electrodes
Electrostatic actuators
Mirrors
Natural frequencies
Optical switches
Resonance
Switching systems
Electrostatic fringing fields
Optical cross-connects (OXC)
Sidewall electrodes
Microelectromechanical devices
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
Descripción
Sumario:We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times.

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