Dosimetry Insulating layers Ionizing radiation MOS devices Nanoelectronics Temperature Zero temperature coefficients Absorbed dose Aluminum Analytic expressions Atomic layer deposited Atomic layer deposition C-V measurement Capacitance Capacitance-voltage curve Capacitance-voltage techniques Charge trapping/detrapping Constant capacitance Dosimeters Electrical characteristic Electron trap density Electron traps Error compensation Experimental data Experimental evidence Gate dielectrics Gate oxide Hafnium oxides Heat radiation High dose rate